Chuck pin, substrate holding device, and substrate processing device

Abstract

A chuck pin is provided on a base part rotating around a reference axis extending in an up-down direction and holding a substrate that is disposed above the base part, the substrate being subjected to processing by a processing liquid. The check pin includes: a main body part having a main surface at an upper portion; a lower surface support part that is provided to protrude upward from the main surface and that supports a lower surface of the substrate; and a side surface grip part that is provided to protrude upward from the main surface while being separated from the lower surface support part and that grips a side surface of the substrate.

Dependencies are inferred from the claim text.