Memory device with back-gate transistor
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMENG-HAN LIN, CHIA-EN HUANG, YA-YUN CHENG, PENG-CHUN LIOU
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMENG-HAN LIN, CHIA-EN HUANG, YA-YUN CHENG, PENG-CHUN LIOU
Estimating the term…
A method includes: forming an interconnect structure over a substrate, the forming of the interconnect structure includes forming a memory device including a transistor. The forming of the interconnect structure includes: forming a first metallization layer and a second metallization layer over the first metallization layer; forming a gate region of the transistor in at least one of the first and second metallization layers; etching a trench disposed in the second metallization layer and exposing the gate region; depositing a gate dielectric layer in the trench over the gate region; depositing a channel layer in the trench over the gate dielectric layer; and forming two source/drain regions of the transistor over the channel layer on opposite sides of the trench. At least one of the gate region and the channel layer includes two first segments extending in the trench, wherein the first segments are parallel with each other.
A semiconductor structure, comprising:
A semiconductor structure, comprising:
A semiconductor structure, comprising:
Dependencies are inferred from the claim text.