Computer system, sample observation method, and program
AssigneeHitachi High-Tech Corporation
InventorsYuki DOI, Atsushi MIYAMOTO, Naoaki KONDO, Kosuke MATSUMOTO, Hirohiko KITSUKI
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AssigneeHitachi High-Tech Corporation
InventorsYuki DOI, Atsushi MIYAMOTO, Naoaki KONDO, Kosuke MATSUMOTO, Hirohiko KITSUKI
Estimating the term…
Provided is a technology that can realize preferable image quality quantification regarding a technology of a sample observation apparatus and the like. A computer system in a sample observation apparatus for observing a sample includes at least one processor and at least one memory, and the processor determines a plurality of evaluation partial areas Si in an image 201 captured of the sample, and calculates a plurality of image quality evaluation values Ei for evaluating a plurality of different image quality items by calculating an image quality evaluation value Ei for each evaluation partial area Si on the basis of the plurality of evaluation partial areas Si.
A computer system in a sample observation apparatus for observing a sample, the computer system comprising:
A sample observation method executed in a sample observation apparatus for observing a sample,
Dependencies are inferred from the claim text.