Safety Interlock Control System and Safety Interlock Control Method

A safety interlock control system comprising:

• a user interface configured to receive, from a user, input data comprising data in a form of natural language and to transmit a response to the user;
• and
• an interlock manager configured to perform a text mining algorithm on the input data to derive a list of selective safety interlocks corresponding to the input data, identify whether the list of selective safety interlocks is activated, and transmit a warning to the user about a list of bypassed selective safety interlocks that are not activated,
• wherein the interlock manager comprises:
• a log analyzer configured to match a facility operation corresponding to the input data;
• an interlock matcher configured to match the list of selective safety interlocks corresponding to the facility operation;
• an interlock event analyzer configured to identify whether the matched list of selective safety interlocks is activated;
• and
• an interlock result integrator configured to transmit, to the user, the list of bypassed selective safety interlocks that are not activated, via the user interface.

A safety interlock control system comprising:

• a user interface configured to receive, from a user, input data comprising data in a form of natural language and to transmit a response to the user;
• an interlock manager configured to perform a text mining algorithm on the input data to derive a list of selective safety interlocks corresponding to the input data, identify whether the list of selective safety interlocks is activated, and transmit a warning to the user about a list of bypassed selective safety interlocks that are not activated;
• and
• a statistical analyzer configured to infer a safety interlock bypass pattern based on the input data and the list of bypassed selective safety interlocks,
• wherein the interlock manager comprises:
• a log analyzer configured to match a semiconductor facility operation corresponding to the input data;
• an interlock matcher configured to match the list of selective safety interlocks corresponding to the semiconductor facility operation and required to be activated;
• an interlock event analyzer configured to identify whether the matched list of selective safety interlocks is activated;
• and
• an interlock result integrator configured to transmit, to the user, the list of bypassed selective safety interlocks that are not activated, via the user interface, and
• wherein the log analyzer comprises:
• a pre-processor configured to pre-process the input data;
• a feature extractor configured to extract features from the pre-processed input data;
• and
• an analyzer configured to determine a facility operation corresponding to the input data based on the extracted features, and
• wherein the interlock event analyzer is configured to determine whether the selective safety interlock is activated based on sensing data from a main sensor configured to directly identify whether a safety interlock of a semiconductor facility is activated, and
• wherein the interlock result integrator is configured to:
• transmit a warning to the user about the list of bypassed selective safety interlocks via the user interface;
• and
• store the list of bypassed selective safety interlocks and the input data corresponding to the list of bypassed selective safety interlocks in a database.