Mems sensor component, mems sensor device, and method for operating the mems sensor device

A MEMS sensor device, comprising:

• a MEMS sensor component;
• and
• a signal processing unit configured to at least one of receive, apply, or process signals of the MEMS sensor component;
• wherein the MEMS sensor component includes:
• a support structure.
• a first membrane and a second membrane which are anchored to the support structure and connected to one another by an end wall.
• a cavity which is bordered by the support structure, the first membrane, the second membrane, and the end wall.
• a sound measuring apparatus arranged in the cavity and configured to detect a sound signal acting on the first membrane and/or the second membrane. and
• an acceleration measuring apparatus arranged in the cavity and configured to detect an acceleration force acting on the MEMS sensor component.

A method for operating a MEMS sensor device, the MEMS sensor device including:

• a MEMS sensor component, and
• a signal processing unit configured to at least one of receive, apply, or process signals of the MEMS sensor component,
• wherein the MEMS sensor component includes:
• a support structure,
• a first membrane and a second membrane which are anchored to the support structure and connected to one another by an end wall,
• a cavity which is bordered by the support structure, the first membrane, the second membrane, and the end wall,
• a sound measuring apparatus arranged in the cavity and configured to detect a sound signal acting on the first membrane and/or the second membrane, and
• an acceleration measuring apparatus arranged in the cavity and configured to detect an acceleration force acting on the MEMS sensor component,
• the method comprising at least one of the following steps:
• providing or processing, by the signal processing unit, an acceleration-compensated sound measurement signal from the sound measuring apparatus, based on an acceleration measurement signal from the acceleration measuring apparatus, or
• providing or processing, by the signal processing unit, at least one of:
• (i) an acceleration measurement signal from the acceleration measuring apparatus, (ii) a sound measurement signal from the sound measuring apparatus, or (iii) a pressure measurement signal from the pressure measuring apparatus, independently of one another.