Powder Supply System
AssigneeTatsuta Electric Wire & Cable Co., Ltd.
InventorMasaki HIRANO
Life of this patent
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Abstract
The powder supply system includes a hopper, a powder supply unit, a pressure adjustment unit, and an on-off valve. The hopper stores powder to be supplied to a film deposition apparatus. The powder supply unit is connected to the hopper, and supplies the powder to the hopper while maintaining a constant pressure difference with respect to the hopper. The pressure adjustment unit that adjusts an internal pressure of the hopper and an internal pressure of the powder supply unit so as to maintain the internal pressure of the hopper and the internal pressure of the powder supply unit constant. The on-off valve is provided on a member that connects the hopper and the powder supply unit.
Claims7
A powder supply system comprising:
- a hopper that stores powder to be supplied to a film deposition apparatus;
- a powder supply unit that is connected to the hopper and supplies the powder to the hopper while maintaining a constant pressure difference with respect to the hopper;
- a pressure adjustment unit that adjusts an internal pressure of the hopper and an internal pressure of the powder supply unit so as to maintain the internal pressure of the hopper and the internal pressure of the powder supply unit constant;
- and
- an on-off valve that is provided on a member that connects the hopper and the powder supply unit.
Dependencies are inferred from the claim text.