Methods for making flow cell surfaces

A patterned substrate, comprising:

• a multi-layer structure including:
• a first resin layer positioned over a base support, the first resin layer comprising a first polymer having a first functional group selected from the group consisting of an amino, an alkynyl, a cycloalkynyl, a cycloalkenyl, a carboxyl, a vinyl, a thiol, an acrylate, an epoxy, and an epoxy siloxane;
• a second resin layer positioned over the first resin layer, the second resin layer comprising a second polymer having a second functional group selected from the group consisting of an amino, an alkynyl, a cylcoalkynyl, a cycloalkenyl, a carboxyl, a vinyl, a thiol, an acrylate, an epoxy, and an epoxy siloxane, wherein the second functional group is orthogonal to the first functional group;
• and
• an inert layer positioned between the first resin layer and the second resin layer, wherein the inert layer is inert to the first and second functional groups;
• a plurality of discrete regions defined in the multi-layer structure and separated by exposed portions of the inert layer, each of the plurality of discrete regions including:
• a depression defined through the inert layer and in the first resin layer;
• and
• a pillar defined in the second resin layer and positioned adjacent to the depression.

A method, comprising:

• contacting a multi-layer stack including a base support, a first resin layer over the base support, a second resin layer over the first resin layer, and a third resin layer over the second resin layer with a working stamp to define a plurality of discrete multi-depth features in the third resin layer, wherein:
• each of the multi-depth features includes a deep portion and a shallow portion directly adjacent to the deep portion;
• the first resin layer of the multi-layer stack comprises a first polymer having a first functional group selected from the group consisting of an amino, an alkynyl, a cycloalkynyl, a cycloalkenyl, a carboxyl, a vinyl, a thiol, an acrylate, an epoxy, and an epoxy siloxane;
• and
• the second resin layer of the multi-layer stack comprises a second polymer having a second functional group selected from the group consisting of an amino, an alkynyl, a cylcoalkynyl, a cycloalkenyl, a carboxyl, a vinyl, a thiol, an acrylate, an epoxy, and an epoxy siloxane, and the second functional group is orthogonal to the first functional group;
• and
• etching the multi-layer stack having the plurality of discrete multi-depth features defined therein i) at each of the deep portions to form a first portion of a multi-depth depression extending through the second resin layer and having a bottom defined by a surface of the first resin layer, and ii) at each of the shallow portions to form a second portion of the multi-depth depression and to expose a surface of the second resin layer.

A patterned substrate, comprising:

• a multi-layer structure including:
• a first resin layer positioned over a base support;
• a second resin layer positioned over the first resin layer;
• one of the first resin layer or the second resin layer comprising an epoxy siloxane and an other of the second resin layer or the first resin layer comprising a carbon-containing functional group;
• and
• a third resin layer positioned over the second resin layer;
• and
• a plurality of multi-depth depressions defined in the multi-layer structure and separated by exposed portions of the third resin layer, each of the plurality of multi-depth depressions including:
• a depression defined through the second resin layer and having a bottom defined by a surface of the first resin layer;
• and
• an exposed surface of the second resin layer positioned adjacent to the depression.

A method for patterning a surface of a substrate, comprising:

• imprinting a third resin layer of a multi-layer stack to form a multi-height convex region including a first region with a first height and a second region with a second height that is smaller than the first height, wherein the multi-layer stack includes the third resin layer over a second resin layer over a first resin layer over a base support, wherein:
• the first resin layer of the multi-layer stack comprises a first polymer having a first functional group selected from the group consisting of an amino, an alkynyl, a cycloalkynyl, a cycloalkenyl, a carboxyl, a vinyl, a thiol, an acrylate, an epoxy, and an epoxy siloxane;
• and
• the second resin layer of the multi-layer stack comprises a second polymer having a second functional group selected from the group consisting of an amino, an alkynyl, a cylcoalkynyl, a cycloalkenyl, a carboxyl, a vinyl, a thiol, an acrylate, an epoxy, and an epoxy siloxane, and the second functional group is orthogonal to the first functional group;
• and
• selectively etching the multi-layer stack i) at the first and second regions to form a multi-height protrusion including an exposed portion of the second resin layer and an exposed portion of the first resin layer, and ii) around the multi-height convex region to expose the base support.

A patterned substrate, comprising:

• a base support;
• and
• a plurality of multi-height protrusions defined over the base support and separated by exposed portions of the base support, each of the multi-height protrusions including:
• a first resin layer having an exposed surface, the first resin layer comprising a first polymer having a first functional group selected from the group consisting of an amino, an alkynyl, a cycloalkynyl, a cycloalkenyl, a carboxyl, a vinyl, a thiol, an acrylate, an epoxy, and an epoxy siloxane;
• and
• a second resin layer over a portion of the first resin layer adjacent to the exposed surface, the second resin layer comprising a second polymer having a second functional group selected from the group consisting of an amino, an alkynyl, a cylcoalkynyl, a cycloalkenyl, a carboxyl, a vinyl, a thiol, an acrylate, an epoxy, and an epoxy siloxane, and the second functional group being orthogonal to the first functional group.

A working stamp, comprising:

• a substrate having a planar surface;
• and
• a plurality of discrete features formed in the substrate and separated from one another by the planar surface, each of the discrete features including:
• a concave portion defined in the substrate and extending in a first direction from the planar surface;
• and
• a convex portion defined in the substrate and extending in a second direction from the planar surface;
• wherein the second direction is opposed to the first direction, and the concave and convex portions are directly adjacent to each other.