Device, method, and recording medium for controlling substrate processing process

A device comprising:

• a communication circuit configured to communicate with a measuring device;
• at least one processor;
• and
• at least one memory storing commands to be executed by the at least one processor,
• wherein the at least one processor is configured to, when the commands are executed:
• obtain, from the measuring device, first mounting result information resulting from measuring a state in which a component mounting device has mounted a target component on a target substrate, wherein the component mounting device includes a plurality of parts having a hierarchical relationship;
• determine whether at least one part of the plurality of parts is in an abnormal state based on the first mounting result information and the hierarchical relationship;
• and
• upon the determination that the at least one part is in the abnormal state, control the measuring device to stop providing feedback to the component mounting device,
• wherein the abnormal state indicates that the at least one part does not satisfy predetermined criteria.