Analysis apparatus, analysis program, method, semiconductor device, and semiconductor wafer

An analysis apparatus configured to execute an analysis process for electromagnetic noise performance of a sample, comprising:

• at least one processor that executes a program stored in a storage medium and/or at least one dedicated circuit, implementing:
• a model generation unit configured to generate a model having a noise performance value of the electromagnetic noise performance of a first sample as a response variable and having a plurality of product characteristic values of the first sample as explanatory variables;
• and
• an output unit configured to input a plurality of product characteristic values of the first sample to the explanatory variables of the model, and configured to output data related to analysis of the electromagnetic noise performance of the first sample by using the model.

An analysis program stored in a non-transitory storage medium to execute an analysis process for electromagnetic noise performance of a sample by using at least one processor,

• the analysis program causing the at least one processor to execute:
• generating a model having a noise performance value of the electromagnetic noise performance of a first sample as a response variable and having a plurality of product characteristic values of the first sample as explanatory variables;
• and
• inputting a plurality of product characteristic values of a second sample different from the first sample to the explanatory variables of the model, and outputting data related to analysis of the electromagnetic noise performance of the second sample by using the model, wherein the plurality of product characteristic values of the second sample corresponds to the plurality of product characteristic values of the first sample.