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US 2026/0267171 A1Published application
Thermo-optic phase shifters
AssigneeGlobalFoundries U.S. Inc.
InventorAneesh Dash
Life of this patent
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Abstract
Structures for a thermo-optic phase shifter and methods of forming such structures. The structure comprises a waveguide core including a section, a first layer including a first portion that overlaps with the section of the first waveguide core, and a second layer on a second portion of the first layer. The first layer comprises boron nitride, and the second layer comprises a conductor.
Claims20
A structure for a thermo-optic phase shifter, the structure comprising:
- a first waveguide core including a first section;
- a first layer including a first portion and a second portion, the first portion of the first layer overlapping with the first section of the first waveguide core, and the first layer comprising boron nitride;
- and
- a second layer on the second portion of the first layer, the second layer comprising a conductor.
1 more element
A method of forming a structure for a thermo-optic phase shifter, the method comprising:
- forming a waveguide core;
- forming a first layer including a first portion that overlaps with a section of the waveguide core, wherein the first layer comprises boron nitride;
- and
- a second layer on a second portion of the first layer, wherein the second layer comprises a conductor.
1 more element
Dependencies are inferred from the claim text.