Method for manufacturing metasurface with improved efficiency by imprinting process

Abstract

The present invention relates to a technique for manufacturing a metasurface fabricated by an imprinting process with improved efficiency, and more particularly, to a technical concept of fabricating an efficiency-enhanced metasurface by forming nanoantennas using a polymer-based imprint resin and subsequently coating the surface with a high-refractive-index material. According to one embodiment, a method for fabricating a metasurface may comprise: mixing nanoparticles of a nanoantenna material with a photocurable polymer or a thermosetting polymer and applying the mixture onto a substrate; imprinting the photocurable polymer or the thermosetting polymer with an imprint stamp having a surface relief structure and a predetermined pattern to form a structure of the photocurable polymer or the thermosetting polymer on the substrate and curing the structure; and coating a high-refractive-index material on a surface of the cured structure by a deposition process.

Dependencies are inferred from the claim text.