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US 2026/0266876 A1Published application
Method of manufacturing a probe head manufactured by stacking probe pins and combined with a spatial converter and an anisotropic conductive film
AssigneeNANO-X GmbH
InventorsDoo Jin PARK, Pil Kuk JANG
Life of this patent
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Abstract
Provided is a method for manufacturing a probe head, and more particularly, to a method for manufacturing a probe head in which the pitch between pins can be finely adjusted by stacking probe pins and the length and shape of the probe pins can be freely formed.
Claims15
A method for manufacturing a probe head, comprising:
- a first elastic layer forming step of forming a first elastic layer;
- a first pin forming step of forming one or more first probe pins on an upper surface of the first elastic layer;
- and
- a second elastic layer stacking step of forming a second elastic layer over the first elastic layer on which the first probe pins are formed.
1 more element
Dependencies are inferred from the claim text.