Apparatus and method for measuring angle of inner surface of optical component in high-speed optical transceiver module

An apparatus for measuring an angle of an inner surface of an optical component in a high-speed optical transceiver module, comprising a vibration isolation table, wherein a base of a light-receiving positioning plate, a mounting base, and a visual recognition unit are disposed on the vibration isolation table, a light-receiving positioning plate is disposed between the base of the light-receiving positioning plate and the mounting base, and the light-receiving positioning plate is located within an imaging range of the visual recognition unit;

• a laser output head, a telecentric objective and a multi-axis adjusting coupling frame configured to adjust a relative position between the laser output head and the telecentric objective are disposed on the base of the light-receiving positioning plate, a multi-axis adjusting unit and a metal part fixing fixture connected to a moving end of the multi-axis adjusting unit are disposed on the mounting base;
• and the light-receiving positioning plate is formed with an avoidance hole, after being focused by the telecentric objective and passing through the avoidance hole, a light beam emitted by the laser output head is projected onto a metal part located in the metal part fixing fixture, and after passing through a central hole of the metal part and being reflected by a surface of a ceramic component or a glass component inside the metal part, the light beam is received by the light-receiving positioning plate;
• and
• the multi-axis adjusting unit comprises a plate axially displaceable along the metal part, a motorized rotary stage rotatable around a central axis of the metal part is disposed on the plate, a multi-dimensional adjusting frame is connected to the motorized rotary stage, and the metal part fixing fixture is connected to a moving end of the multi-dimensional adjusting frame;
• and the plate is configured to adjust a far-near field of the multi-dimensional adjusting frame to move ΔL, so as to calculate the angle of the inner surface of the optical component.