Heat reclamation multiple waste tanks at each stage

Abstract

Aspects of the present disclosure provide a system for storing hot/cold waste generated during some processing steps in a wafer processing system and providing the stored hot/cold waste during next processing steps. For example, the system can include one or more hot waste tanks configured to store hot waste generated from the wafer processing system, one or more waste mixing tanks configured to mix the hot waste stored in the hot waste tanks with cold waste and output mixed hot/cold waste, a first heat exchanger thermally coupled between the hot waste tanks and the waste mixing tanks and configured to transfer the hot waste stored in the hot waste tanks to the waste mixing tanks, and a second heat exchanger thermally coupled to the waste mixing tanks and configured to transfer the mixed hot/cold waste to a next stage.

Dependencies are inferred from the claim text.