Method for simultaneously producing multiple sheets of sic single crystal substrate
AssigneeNGK Corporation
InventorsYohei OKADA, Kiyoshi MATSUSHIMA, Jun YOSHIKAWA
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AssigneeNGK Corporation
InventorsYohei OKADA, Kiyoshi MATSUSHIMA, Jun YOSHIKAWA
Estimating the term…
There is provided a method capable of simultaneously manufacturing multiple SiC single crystal substrates including: preparing multiple containers; placing, in each of the multiple containers, an SiC single crystal serving as a seed crystal and an SiC mixed powder containing SiC powder and a liquid phase sintering aid so as to form an SiC mixed powder layer in which the SiC mixed powder is in contact with the SiC single crystal, wherein the liquid phase sintering aid contains an oxide; arranging the multiple containers in a firing furnace so as to be aligned horizontally and/or vertically; and heating the inside of the firing furnace to form a temperature gradient, and subjecting the multiple containers containing the seed crystal and the SiC mixed powder to heat treatment at an average furnace temperature of 2,240 to 2,560° C., whereby an SiC single crystal is grown on the seed crystal.
A method for simultaneously manufacturing multiple SiC single crystal substrates, the method comprising:
Dependencies are inferred from the claim text.