Ampoule blocker
AssigneeApplied Materials, Inc.
InventorsHao ZHUANG, Aixi ZHANG, Bingqian LIU, Yi XU, Yu LEI, Rongjun WANG
Life of this patent
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Abstract
In one or more embodiments, a precursor delivery system includes a container and a blocker inserted into the cavity of the container. The blocker defines a frustum-shaped region, the frustum-shaped region including a first opening positioned at a first end of the frustum-shaped region and a second opening positioned at a second end of the frustum-shaped region. The first end is positioned a distance below the second end. The first opening includes a first area and the second opening includes a second area.
Claims20
A precursor delivery system, comprising:
- a container comprising one or more walls that define an internal region, wherein the internal region comprises a top end, a bottom end, and a frustum-shaped region positioned between the top end and the bottom end, wherein the frustum-shaped region comprises:
- a first opening positioned at a first end of the frustum-shaped region;
- and
- a second opening positioned at a second end of the frustum-shaped region, wherein:
- the first opening comprises a first area and the second opening comprises a second area;
- and
- the second end is positioned a first distance from the first end and below the first end.
An ampoule, comprising:
- a container, comprising:
- a lid comprising an inlet port and an outlet port;
- at least one sidewall;
- a bottom;
- and
- an internal region defined as the space enclosed by the lid, sidewall, and bottom;
- and
- a blocker feature positioned inside the internal region of the container, the blocker feature comprising a frustum-shaped region, wherein the frustum-shaped region comprises:
- a first opening positioned at a first end of the frustum-shaped region;
- and
- a second opening positioned at a second end of the frustum-shaped region, wherein:
- the first opening comprises a first area and the second opening comprises a second area;
- and
- the second end is positioned a first distance from the first end and below the first end.
An ampoule blocker configured to be positioned in a container coupled to a deposition chamber, comprising a frustum-shaped cavity, wherein the frustum-shaped cavity comprises:
- a first opening positioned at a first end of the frustum-shaped cavity;
- and
- a second opening positioned at a second end of the frustum-shaped cavity, wherein:
- the first opening comprises a first area and the second opening comprises a second area;
- the second end is positioned a first distance from the first end and below the first end;
- and
- a ratio of the first area to the second area is between about 0.75 and about 0.99.
Dependencies are inferred from the claim text.