Method for recycling silicon in wastewater

Abstract

A method is provided for recycling silicon from wastewater generated during semiconductor processing. The method includes coagulating silicon particles in the wastewater using a dielectrophoresis device to increase particle size, forming a silicon slurry with a microfiltration device, pressing the slurry to form a silicon cake, and drying the cake in a fluidized bed reactor to obtain silicon powder. The process enables efficient recovery of high-purity silicon using filters with relatively large pores, thereby reducing filter damage from heat generation and improving recovery yield. The recovered silicon powder may be further analyzed, purified of metal impurities, and recycled as a raw material for semiconductor wafers, silicon carbide power devices, or negative electrode materials for rechargeable batteries. This method provides both economic and environmental benefits by securing high-purity silicon materials from otherwise discarded wastewater.

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