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US 2026/0262477 A1Published application
Method, assembly and system for gas injection and control
AssigneeASM IP Holding B.V.
InventorsPeipei Gao, Wentao Wang, Han Ye, Kai Zhou, Fan Gao, Xing Lin
Life of this patent
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Abstract
Methods, systems, and assemblies suitable for gas-phase processes are disclosed. An exemplary assembly includes a susceptor ring and at least one injector tube. The injector tube can be disposed within the susceptor ring to provide a gas to a peripheral region of a substrate. Methods, systems, and assemblies can be used to obtain desired (e.g. composition and/or thickness) profiles of material on a substrate surface.
Claims20
A susceptor ring assembly, comprising:
- a susceptor ring comprising a top surface and a first edge, wherein the first edge comprises an opening extending to a first injector cavity within the susceptor ring, wherein the top surface comprises a first injector port extending from the top surface to the first injector cavity at a first injection angle;
- and
- a first injector tube at least partially disposed within the first injector cavity.
A reactor system comprising:
- a reactor comprising a reaction chamber;
- and
- a susceptor ring assembly disposed within the reactor, the susceptor ring assembly comprising:
- a susceptor ring comprising a top surface, a first edge, and a first injector cavity extending from an opening comprised in the first edge, wherein the top surface comprises a first injector port extending from the top surface to the first injector cavity at a first injection angle;
- and
- a first injector tube at least partially disposed within the first injector cavity.
3 more elements
A method, comprising the steps of:
- providing a substrate within a reaction chamber of a reactor system, wherein the reactor system comprises a susceptor ring assembly comprising:
- a susceptor ring comprising a top surface and a first edge, wherein the first edge comprises an opening extending to a first injector cavity within the susceptor ring, wherein the top surface comprises a first injector port extending from the top surface to the first injector cavity at a first injection angle;
- and
- a first injector tube at least partially disposed within the first injector cavity;
- and
- flowing a gas through the first injector tube.
3 more elements
Dependencies are inferred from the claim text.