Gas mixture for hollow core fiber used in generating broadband radiation
AssigneeASML Netherlands B.V.
InventorsSebastian Thomas BAUERSCHMIDT, Paulus Antonius Andreas TEUNISSEN, Amir ABDOLVAND
Life of this patent
Estimating the term…
Loading patent…
AssigneeASML Netherlands B.V.
InventorsSebastian Thomas BAUERSCHMIDT, Paulus Antonius Andreas TEUNISSEN, Amir ABDOLVAND
Estimating the term…
A hollow core fiber and source assembly for broadband generation, wherein a hollow core of the hollow core fiber is filled with a gas composition comprising a working gas. The fiber is configured to receive pulsed pump radiation at an input end of the hollow core fiber, the pulsed pump power having a pulse power exceeding an ionization threshold of the gas composition. The fiber is configured to confine and guide the pulsed pump radiation through the fiber such that it interacts with the working gas for generating broadband radiation through nonlinear broadening of the pulsed pump radiation. The gas composition comprises a hydrogen component which is less than 1% of the total gas composition in the hollow core fiber.
-15. (canceled)
A hollow core fiber for broadband generation, wherein a hollow core of the hollow core fiber is filled with a gas composition comprising a working gas, wherein the fiber is configured to:
Dependencies are inferred from the claim text.