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AssigneeASML Netherlands B.V.
InventorsSebastian Thomas BAUERSCHMIDT, Phani Kumar DOMALAPALLY, Patrick Sebastian UEBEL, Peter Maximilian GÖTZ
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An apparatus for broadband radiation generation including a fiber disposed in an enclosure including: a body; and a heat transport region configured to transport heat from the fiber to the body, the heat transport region including a first medium disposed between the fiber and the body, wherein, in at least one radial direction from the fiber, the heat transport region further includes a second medium disposed between the first medium and the body over a portion of the enclosure, the second medium including a solid and/or a liquid, wherein a radial distance between the fiber and the second medium is less than or equal to 2 mm and wherein the second medium forms a slit over the portion of the enclosure, the slit extending in a direction perpendicular to a longitudinal axis of the fiber, the slit being wider than a diameter of the fiber.
An apparatus for broadband radiation generation, the apparatus comprising a hollow-core fiber at least partially disposed in an enclosure, the enclosure comprising:
Dependencies are inferred from the claim text.