Silicon nitride core rib waveguides and methods of manufacturing the same
AssigneeCorning Incorporated
InventorsSukru Ekin Kocabas, Barry James Paddock, Haitao Zhang, Bin Zhu
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AssigneeCorning Incorporated
InventorsSukru Ekin Kocabas, Barry James Paddock, Haitao Zhang, Bin Zhu
Estimating the term…
A method of manufacturing a silicon nitride optical device includes depositing a silicon nitride film on a rare-earth doped transparent polycrystalline ceramic substrate, depositing an aluminum film on the silicon nitride film, and coating a photoresist layer on the aluminum film. The method then includes exposing the sample in a photolith using a rib waveguide photo mask, etching the aluminum film, and removing the photoresist layer. The method further includes etching the silicon nitride film to a depth, removing the aluminum film, and depositing a silicon dioxide (SiO2) cladding on to the silicon nitride film and the rare-earth doped transparent polycrystalline ceramic substrate.
A method of fabricating a rib waveguide, the method comprising:
A rib waveguide, comprising:
A quantum memory system comprising an optical device comprising a silicon nitride core on a rare-earth doped polycrystalline ceramic substrate, a magnetic field generation unit, a storage photon generator, and one or more pump lasers, wherein:
Dependencies are inferred from the claim text.