Vibration component measuring device, kelvin probe force spectrometer, vibration component measuring method, and interface state density measuring method

A vibration component measuring device comprising:

• a vibration section;
• a first AC signal generator configured to generate a first AC signal;
• a second AC signal generator configured to generate a second AC signal having a frequency which is higher than a frequency of the first AC signal and which differs from an integral multiple of the frequency of the first AC signal;
• a reference AC signal generator configured to generate a reference AC signal having a frequency which is lower than the frequency of the first AC signal;
• a DC signal generator configured to generate a DC signal;
• a vibration control section configured to cause the vibration section to vibrate on the basis of the first AC signal;
• a signal applying section configured to apply, between the vibration section and a sample, the DC signal and at least one selected from the group consisting of the second AC signal and the reference AC signal;
• and
• a measuring section configured to measure a first derivative value, with respect to a voltage of the DC signal, of a varying component of vibration of the vibration section, the varying component being varied by an interaction between the vibration section and the sample.

A vibration component measuring device comprising:

• a vibration section;
• a first AC signal generator configured to generate a first AC signal;
• a second AC signal generator configured to generate a second AC signal having a frequency which is higher than a frequency of the first AC signal and which differs from an integral multiple of the frequency of the first AC signal;
• a reference AC signal generator configured to generate a reference AC signal having a frequency which is lower than the frequency of the first AC signal;
• a DC signal generator configured to generate a DC signal;
• a vibration control section configured to cause the vibration section to vibrate on the basis of the first AC signal;
• a signal applying section configured to apply, between the vibration section and a sample, the DC signal and at least one selected from the group consisting of the second AC signal and the reference AC signal;
• and
• a measuring section configured to measure a second derivative value, with respect to a voltage of the DC signal, of a varying component of vibration of the vibration section, the varying component being varied by an interaction between the vibration section and the sample.

A method for measuring a vibration component, comprising the steps of:

• generating a first AC signal for causing a vibration section to vibrate;
• generating a second AC signal having a frequency which is higher than a frequency of the first AC signal and which differs from an integral multiple of the frequency of the first AC signal;
• generating a reference AC signal having a frequency which is lower than the frequency of the first AC signal;
• generating at least two DC signals including a first DC signal and a second DC signal having a voltage which is different from a voltage of the first DC signal;
• and
• measuring a varying component of vibration of the vibration section by applying, between the vibration section and a sample, each of the DC signals and at least one selected from the group consisting of the second AC signal and the reference AC signal and causing the vibration section to vibrate on the basis of the first AC signal, the varying component of the vibration of the vibration section being varied by an interaction between the vibration section and the sample,
• in the step of measuring the varying component, a change in the varying component relative to a change in voltage value between the first DC signal and the second DC signal being measured from the varying component in a case where the DC signal applied is set to the first DC signal and the varying component in a case where the DC signal applied is set to the second DC signal.

A method for measuring a vibration component, comprising the steps of:

• generating a first AC signal for causing a vibration section to vibrate;
• generating a second AC signal having a frequency which is higher than a frequency of the first AC signal and which differs from an integral multiple of the frequency of the first AC signal;
• generating a reference AC signal having a frequency which is lower than the frequency of the first AC signal;
• generating a DC signal;
• and
• measuring a first derivative value, with respect to a voltage of the DC signal, of a varying component of vibration of the vibration section by applying, between the vibration section and a sample, the DC signal and at least one selected from the group consisting of the second AC signal and the reference AC signal and causing the vibration section to vibrate on the basis of the first AC signal, the varying component of the vibration of the vibration section being varied by an interaction between the vibration section and the sample.

A method for measuring a vibration component, comprising the steps of:

• generating a first AC signal for causing a vibration section to vibrate;
• generating a second AC signal having a frequency which is higher than a frequency of the first AC signal and which differs from an integral multiple of the frequency of the first AC signal;
• generating a reference AC signal having a frequency which is lower than the frequency of the first AC signal;
• generating a DC signal;
• and
• measuring a second derivative value, with respect to a voltage of the DC signal, of a varying component of vibration of the vibration section by applying, between the vibration section and a sample, the DC signal and at least one selected from the group consisting of the second AC signal and the reference AC signal and causing the vibration section to vibrate on the basis of the first AC signal, the varying component of the vibration of the vibration section being varied by an interaction between the vibration section and the sample.