Gas supply system and semiconductor manufacturing apparatus
AssigneeTokyo Electron Limited
InventorMasami SAKURAI
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AssigneeTokyo Electron Limited
InventorMasami SAKURAI
Estimating the term…
A gas supply system including a gas box housing in which a precursor container accommodating a gas precursor is disposed, at least one pipe passing through a through-hole in the gas box housing, through which a fluid flowing into the gas box housing from outside flows, or a fluid flowing out of the gas box housing to the outside flows, and a block member installed in the through-hole and including a pipe surrounding portion configured to integrally surround an inner pipe portion that is a portion of the pipe inside the gas box housing and an outer pipe portion that is a portion of the pipe outside the gas box housing. While the pipe surrounding portion is inserted into a gap between an inner peripheral surface of the through-hole and an outer peripheral surface of the pipe, the block member is fixed to the gas box housing.
A gas supply system comprising:
Dependencies are inferred from the claim text.