Molybdenum compound, method for preparing same, and method for manufacturing thin film comprising same

A preparation method of a molybdenum compound of the following Chemical Formula 1, the preparation method comprising:

• step a) preparing an intermediate by reacting a molybdenum compound represented by the following Chemical Formula 3 and a ligand capable of coordinating with the molybdenum compound;
• and
• step b) preparing a molybdenum compound represented by the following Chemical Formula 1 by reacting the intermediate and a cyclopentadiene-based ligand represented by the following Chemical Formula 4:
• in Chemical Formulas 1 and 4,
• L is C1-C10 alkylene or C3-C10 cycloalkylene, and alkylene and cycloalkylene of L may be further substituted with C1-C10 alkyl;
• R1 to R5 are each independently hydrogen or C1-C7 alkyl;
• Y is —NR11R12, —OR13, or —SR14;
• and
• R11 to R14 are each independently C1-C10 alkyl, halo C1-C10 alkyl, C3-C10 cycloalkyl, C6-C12 aryl, or C6-C12 aryl C1-C10 alkyl, or R11 and R12 may be linked to each other to form a ring.