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US 2026/0255916 A1Published application
Semiconductor processing apparatus
OwnerJaeMin Roh, ChangMin Leeinventors
Life of this patent
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Abstract
A substrate processing apparatus capable of improving the uniformity of thin films on a substrate includes: a substrate support unit having a first slope; and a flow control ring arranged to surround the substrate support unit and having a second slope, wherein, during alignment, as the substrate support unit moves in a first direction, the first slope and the second slope contact each other, and due to the contact, the flow control ring slides in a second direction that is different from the first direction.
Claims20
A substrate processing apparatus comprising:
- a substrate support unit having a first slope;
- a flow control ring arranged to surround the substrate support unit and having a second slope;
- a processing unit;
- a reaction space between the substrate support unit and the processing unit;
- an exhaust unit defining an exhaust space surrounding the reaction space;
- and
- a channel between the reaction space and the exhaust space that is lower than a first upper surface of the substrate support unit,
- wherein a gap is formed between the first slope of the substrate support unit and the second slope of the flow control ring.
5 more elements
A substrate processing apparatus comprising:
- a substrate support unit;
- a flow control ring arranged to surround the substrate support unit;
- a processing unit on the substrate support unit;
- an exhaust unit defining an exhaust space surrounding a reaction space;
- and
- a channel between the reaction space and the exhaust space that is lower than a first upper surface of the substrate support unit,
- wherein a gap is formed between the substrate support unit and the flow control ring, the reaction space and a lower space under the substrate support unit are connected to each other through the gap, and
- wherein a first upper surface of the substrate support unit is higher than a second upper surface of the flow control ring.
5 more elements
Dependencies are inferred from the claim text.