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US 2026/0255722 A1Published application
Layer stack, method and process system
AssigneeVon Ardenne Asset GmbH & Co. KG
InventorsEric Schneiderloechner, Volker Linss, Tina Dietsch
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Abstract
According to various aspects, a layer stack comprises: a carrier layer; one or more passivation layers formed by a physical vapor deposition process, preferably comprising a first passivation layer and/or a second passivation layer, for each of the one or more passivation layers, a metal oxide containing protection layer formed by a chemical vapor deposition process between the passivation layer and the carrier layer.
Claims20
A layer stack comprising:
- a carrier layer;
- one or more passivation layers formed by a physical vapor deposition process;
- wherein the one or more passivation layers comprises a silicon-based passivation layer;
- one or more metal oxide containing protection layers comprising, for each passivation layer of the one or more passivation layers, a protection layer formed by a chemical vapor deposition process between the passivation layer and the carrier layer;
- a dielectric tunnel oxide layer arranged on a rear side of the carrier layer;
- wherein a metal oxide containing protection layer of the one or more metal oxide containing protection layers is arranged between the silicon-based passivation layer and the dielectric tunnel oxide layer.
3 more elements
A process system comprising:
- one or more vacuum chambers;
- multiple process devices disposed in the one or more vacuum chambers, the multiple process devices being configured to provide a process sequence;
- wherein the process sequence of the multiple process devices comprises:
- forming one or more passivation layers over the carrier layer via a physical vapor deposition process;
- and
- forming, for each of the one or more passivation layers, a metal oxide containing protection layer between the passivation layer and the carrier layer via a chemical vapor deposition process;
- and
- a transport device configured for transporting a substrate providing a carrier layer through the one or more vacuum chambers.
5 more elements
Dependencies are inferred from the claim text.