Probe support assembly including a piezoelectric sensor array for alignment of a probe card assembly and methods of operating and forming the same

A test apparatus comprising a probe module assembly, the probe module assembly comprising:

• a probe card;
• a contact interface substrate comprising probe contact pads and attached to a bottom of the probe card;
• an array of probe needles attached to the probe contact pads and vertically extending downward from the probe contact pads;
• a probe support assembly overlying the probe card;
• and
• a tester head to which the probe support assembly is attached, wherein:
• the probe support assembly comprises a piezoelectric device array containing a plurality of piezoelectric unit devices;
• and
• each of the piezoelectric unit devices comprises a respective piezoelectric sensor.

A method forming a test apparatus, comprising:

• providing a probe card;
• attaching a contact interface substrate comprising probe contact pads to a bottom side of the probe card;
• and
• assembling at least a pusher, a backer, and a piezoelectric device array containing a plurality of piezoelectric unit devices along a vertical direction on a top side of the probe card, whereby a probe support assembly is formed.