Method and device for passively identifying system parameters of a microelectromechanical system
OwnerWolfram Mayer, Burkhard Kuhlmann +1inventors
InventorsWolfram Mayer, Burkhard Kuhlmann, Thorsten Balslink
Life of this patent
Estimating the term…
Abstract
A method and a device for passively identifying system parameters of a microelectromechanical system. The method includes a plurality of steps, namely measuring a signal output by the microelectromechanical system excited by noise, determining a frequency response of the measured signal and identifying system parameters of the microelectromechanical system based on the frequency response of the measured signal.
Claims13
A method for passively identifying system parameters of a microelectromechanical system, the method comprising the following steps:
- measuring a signal output by the microelectromechanical system excited by noise;
- determining a frequency response of the measured signal;
- and
- identifying system parameters of the microelectromechanical system based on the frequency response of the measured signal.
A device for passively identifying system parameters of a microelectromechanical system, the device comprising:
- a measurement unit configured to measure a signal output by the microelectromechanical system excited by noise;
- a frequency response determination unit configured to determine a frequency response of the signal measured by the measurement unit;
- and
- a system parameter identification unit configured to identify system parameters of the micromechanical system based on the frequency response of the measured signal determined by the frequency response determination unit.
A microelectromechanical system, comprising:
- a device configured to passively identify system parameters of the microelectromechanical system, the device comprising:
- a measurement unit configured to measure a signal output by the microelectromechanical system excited by noise,
- a frequency response determination unit configured to determine a frequency response of the signal measured by the measurement unit, and
- a system parameter identification unit configured to identify system parameters of the micromechanical system based on the frequency response of the measured signal determined by the frequency response determination unit.
Dependencies are inferred from the claim text.