Device for guiding measuring light to be spectrally analyzed, method for manufacturing such a device, and apparatus for measuring distance and thickness
OwnerPeter Mejainventor
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Abstract
A device for guiding measuring light to be spectrally analyzed in a distance and/or thickness measuring system, in particular in a confocal-chromatic or interferometric distance and/or thickness measuring system, includes an optical waveguide wherein the optical waveguide has an exit end preferably held by a ferrule, for the measuring light, is and an aperture having an aperture opening that is arranged on the exit end Furthermore, a method for manufacturing such a device, and an apparatus for distance and/or thickness measurement, are described.
Claims20
A device for guiding measuring light to be spectrally analyzed in a distance and/or thickness measuring system, comprising:
- an optical waveguide, wherein the optical waveguide has an exit end for the measuring light, and
- an aperture with an aperture opening arranged on the exit end.
Dependencies are inferred from the claim text.