Wafer transportation container
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorFung-Chih HUANG
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorFung-Chih HUANG
Estimating the term…
A wafer transportation container includes a container body and a door. The container body has an inner space for accommodation of wafers, an opening configured to allow passage of the wafers into or out of the inner space, an inner peripheral edge disposed along a perimeter of the opening, and a first protrusion formed immediately inwardly of the inner peripheral edge. The door is removably coupled to the container body, and includes a door body and a second protrusion. The door body has an outer peripheral edge, and an inward surface for confronting the inner space. The second protrusion is formed on the inward surface. The inward surface has an interconnection region between the second protrusion and the outer peripheral edge of the door body. When the door is coupled to the container body, a gap is formed among the first protrusion, the second protrusion and the interconnection region.
A wafer transportation container comprising:
A wafer transportation container comprising:
A wafer transportation container comprising:
Dependencies are inferred from the claim text.