Device, Control Method for Same, and Program

Abstract

A charged particle beam device 100 has an electron gun 102, a deflector 104, a detector 108, a sample stage 105 on which a sample 106 is placed, and a controller 109. Herein, the controller 109, upon receiving an instruction to create a captured image: (1) receives a VC method application region designation; (2) receives, from the detector, a secondary electron detection signal of the sample while sending a control signal generated on the basis of a predetermined scan trajectory to the deflector; and (3) generates a captured image on the basis of the secondary electron detection signal. The captured image includes a first partial region suitable for a VC method and a second partial region suitable for surface observation of the sample.

Dependencies are inferred from the claim text.