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US 2026/0244118 A1Published application
Measurement system, substrate processing system, and device manufacturing method
AssigneeNikon Corporation
InventorsGo ICHINOSE, Yuichi SHIBAZAKI
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Abstract
A measurement system to be used in a micro-device manufacturing line is equipped with: a plurality of measurement devices which performs measurement processing on each substrate; and a controller that can control the plurality of measurement devices, and the plurality of measurement devices includes at least one first measurement device which acquires position information of a plurality of marks formed on a substrate.
Claims1
A measurement system used in a manufacturing line for micro-devices, comprising:
- a plurality of measurement devices, each of which performs measurement processing on a substrate;
- and
- a controller which can control the plurality of measurement devices, wherein
- the plurality of measurement devices includes at least one first measurement device which acquires position information of a plurality of marks formed on the substrate.
1 more element
Dependencies are inferred from the claim text.