Reticle transfer device with reticle pattern facing downward

A reticle transfer device with a reticle pattern facing downward, comprising:

• a base;
• an X-oriented moving table disposed at the base and driven to move in X-direction across the base;
• a Y-oriented moving table disposed at the X-oriented moving table and driven to move in Y-direction across the X-oriented moving table;
• a jaw assembly having two gripping units facing each other and disposed on the Y-oriented moving table, the two gripping units gripping two opposing sides of a reticle rectangular in shape to grip and hold the reticle;
• a pushing positioning assembly having a stationary unit and a pushing unit disposed at the Y-direction moving table, the pushing unit having a pushing block for pushing the reticle to cause the reticle to abut against the stationary unit so as to be positioned in place;
• a lifting rotary table disposed at the base and driven to move in Z-direction across the base;
• and
• a supporting table disposed at the lifting rotary table, adapted to ascend in Z-direction, descend in Z-direction, and rotate horizontally along with the lifting rotary table, having four supporting components, and adapted to support the reticle, the reticle having a patterned surface facing downward, the four supporting components supporting and abutting against four sides of a bottom of the reticle,
• wherein, during its ascent and descent, the supporting table assumes a supporting position, a gripping position, and a bottom position, the supporting position allowing the four supporting components to be higher than the two gripping units, the gripping position allowing the reticle to be between the two gripping units to allow the two gripping units to grip or release the reticle on the supporting table and allow the pushing unit to push or refrain from pushing the reticle, and the bottom position allowing the four supporting components to be lower than the two gripping units.