Resist composition, resist pattern formation method, fluorine-containing polymer compound, and compound
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorKhanhTin NGUYEN
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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorKhanhTin NGUYEN
Estimating the term…
A resist composition including a resin component whose solubility in a development solution changes under the action of the acid and a fluorine-containing polymer compound having a structural unit derived from a compound represented by General Formula (f0-1): In the formula, W1 is a polymerizable group, Ar is an aromatic ring, Xf is an iodine atom or a substituent containing an iodine atom, Lf01 is a single bond or an (n1+1)-valent linking group, Rf01 is a fluorinated alkyl group having 1 to 12 carbon atoms, Rf02 is an organic group having 1 to 12 carbon atoms which may have a fluorine atom or a hydrogen atom, and Rf03 is a substituent other than an iodine atom
A resist composition that generates an acid upon exposure and whose solubility in a development solution changes under the action of the acid, the resist composition comprising:
A fluorine-containing polymer compound having a structural unit (f0) derived from a compound represented by the following General Formula (f0-1):
A compound represented by the following General Formula (f0-1):
Dependencies are inferred from the claim text.