Optical waveguide modulator with selectively removed substrate
AssigneeNokia Solutions and Networks Oy
InventorsAlessandro Aimone, Mark Earnshaw
Life of this patent
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Abstract
An integrated circuit includes a substrate having a main surface and an electrical transmission line extending along the main surface. The electrical transmission line includes a metallic travelling wave electrode (TWE) having a lengthwise sequence of spaced apart openings absent of the metallic material. The substrate has cavities under at least some of the openings. In an example implementation, the TWE is a middle electrode of an electrical transmission line driving an MZM, and the cavities in the substrate extend under side electrodes of the transmission line.
Claims19
An apparatus comprising:
- an integrated circuit comprising:
- a substrate having a main surface;
- and
- an electrical transmission line extending along the main surface, the electrical transmission line comprising a first travelling wave electrode (TWE), the first TWE comprising metallic material;
- wherein the first TWE further comprises a lengthwise sequence of spaced apart openings absent of the metallic material, and wherein the substrate has cavities etched under at least some of the openings.
A method comprising:
- fabricating an electrical transmission line extending along a main surface of a substrate, the electrical transmission line comprising a first travelling wave electrode (TWE), the first TWE comprising metallic material and a lengthwise sequence of spaced apart openings that are absent of the metallic material;
- removing parts of the substrate through the openings to form cavities in the substrate.
Dependencies are inferred from the claim text.