Embedded microlens
AssigneeApplied Materials, Inc.
InventorsKenichi OHNO, Steven VERHAVERBEKE, Robert Jan VISSER
Life of this patent
Estimating the term…
Abstract
Embodiments described herein relate to a photonic device having a microlens and micromirror embedded therein and methods of fabricating such a device. An example photonic device comprises a substrate; a buried oxide (BOX) layer disposed over the substrate; a waveguide layer disposed over the BOX layer, the waveguide layer comprising a waveguide; a micromirror arranged in at least a portion of the waveguide layer; a cladding disposed over the waveguide layer; and a lens layer disposed over the cladding, the lens layer having a microlens aligned with the micromirror.
Claims20
A photonic integrated circuit, comprising:
- a substrate;
- a buried oxide (BOX) layer disposed over the substrate;
- a waveguide layer disposed over the BOX layer, the waveguide layer comprising a waveguide;
- a micromirror arranged in at least a portion of the waveguide layer;
- a cladding disposed over the waveguide layer;
- and
- a lens layer disposed over the cladding, the lens layer having a microlens aligned with the micromirror.
A photonic integrated circuit, comprising:
- a first waveguide;
- a second waveguide;
- and
- an optical via having a first optical redirection element and a second optical redirection element, wherein the first optical redirection element is configured to reflect an optical signal from the first waveguide to the second optical redirection element, and wherein the second optical redirection element is configured to reflect the optical signal from the first optical redirection element to the second waveguide.
A photonic system, comprising:
- a first photonic integrated circuit (PIC), a first lens being disposed on a surface of the first PIC;
- and
- a second PIC, a second lens being disposed on a surface of the second PIC, wherein the first lens is aligned with the second lens such that an optical signal is configured to be communicated between the first lens and the second lens.
A photonic system, comprising:
- a substrate;
- a buried oxide (BOX) layer disposed over the substrate;
- a device layer disposed over the BOX layer, the device layer having a device;
- a cladding disposed over the device layer;
- and
- a lens layer disposed over the cladding, the lens layer having a microlens aligned with the device.
Dependencies are inferred from the claim text.