Metalens, method of manufacturing metalens, electronic device, and method of designing metalens

A metalens comprising, in this order:

• a support substrate;
• and
• a pattern layer having an array pattern composed of a plurality of silicon oxide columnar bodies or a plurality of holes, wherein
• a maximum value of an aspect ratio of the plurality of silicon oxide columnar bodies or the plurality of holes in the pattern layer is greater than 6.7, and
• at least surfaces of the plurality of silicon oxide columnar bodies or the plurality of holes of the pattern layer are SiO2 obtained by oxidation of Si.

A method of designing a metalens, the method comprising:

• performing phase difference calculation of calculating a phase difference φ(r) with respect to a distance r from a center of the metalens, based on a set wavelength λ and a set focal length f of incident light;
• performing columnar body dimension determination of determining ranges of a height H and a width ax and a period Λx of silicon oxide columnar bodies included in the metalens by calculating a relationship between the height H, the width ax and the period Λx and a phase difference φ(ax) with respect to the width ax;
• and
• after the performing columnar body dimension determination, performing columnar body width with respect to distance r calculation of calculating the width ax with respect to the distance r from the center of the metalens, from a relationship between the phase difference φ(r) with respect to the distance r and the phase difference φ(ax) with respect to the width ax, wherein
• in the performing phase difference calculation, when the phase difference φ(r) with respect to the distance r is 360° or greater, φ′(r) is calculated satisfying Equation (A) and Expression (B) below to correct the width ax of the silicon oxide columnar bodies in consideration of an expansion of silicon due to oxidation:
• φ
• ′
• (
• r
• )
• =
• φ
• ⁡
• (
• r
• )
• -
• 360
• ⁢
• °
• ×
• n
• (
• A
• )
• φ
• ′
• (
• r
• )
• <
• 360
• ⁢
• °
• (
• B
• )
• where in Equation (A), n is a natural number.