Microelectronic devices fabricated with 3d lithography
AssigneeAtum Works Inc.
InventorsMalcolm George Adams Tisdale, Lucas Layne Brass Pabarcius
Life of this patent
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Abstract
A compliant contact includes a body including and extending between a first end and a second end. The second end is configured to couple to an electrically interfacing device. A conductive material defines an outer surface of the body, and the body is formed with a 3D lithographic process and a metallization process.
Claims121
A compliant contact comprising:
- a body including and extending between a first end and a second end, wherein the second end is configured to couple to an electrically interfacing device;
- and
- a conductive material, wherein the conductive material defines an outer surface of the body, wherein the body is formed with a 3D lithographic process and a metallization process.
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A method of forming a compliant contact, the method comprising:
- forming a scaffold with a 3D lithographic process;
- and
- forming a conductive layer over the scaffold, wherein the conductive layer defines an outer surface of the scaffold.
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A microelectronic device comprising:
- a substrate comprising a plurality of contact pads;
- and
- a plurality of compliant contacts disposed over and electrically connected to the plurality of contact pads, wherein the plurality of compliant contacts comprises a first compliant contact formed with a 3D lithographic process and a metallization process.
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Dependencies are inferred from the claim text.