System and method for cleaning of transmission electron microscope chamber

A method for introducing gaseous reactive species into a transmission electron microscope (TEM) for cleaning, the TEM maintaining an internal vacuum environment and having a specimen port for introducing a specimen into the TEM for imaging, comprising:

• (1) connecting the specimen port of the TEM to a system that includes:
• (a) a plasma generating device that includes an output conduit for supplying the gaseous reactive species;
• and
• (b) a pipe that includes:
• (i) a first end which is coupled in a vacuum-sealed manner to the output conduit of the plasma generating device to receive the reactive species;
• (ii) a second end inserted through the specimen port into the TEM to release the received reactive species;
• and (iii) one or more polymer vacuum rings each provided on an outer surface of the pipe to prevent breaching of the TEM's internal vacuum environment;
• and
• (2) providing a support structure for securing the system to the TEM during cleaning.