Piezoelectric trenches interleaved with electrodes of a saw resonator for improved performance

Abstract

A surface acoustic wave (SAW) resonator device is provided. The SAW resonator device includes a first electrode positioned on an upper surface of a piezoelectric film; a second electrode positioned on the upper surface of the piezoelectric film; and a first piezoelectric trench (PZT) positioned between the first electrode and the second electrode, the first PZT including a recess in the piezoelectric film, the first PZT being of a first trench depth. In some aspects, the piezoelectric trench may alternatively be positioned in the lower surface of the piezoelectric film. In some aspects, the angles of the edges of the piezoelectric trench may be modified as well as the position of the piezoelectric trench relative to the first and second electrodes.

Dependencies are inferred from the claim text.