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US 2026/0237550 A1Published application
Metal magnetic thin film
AssigneeMurata Manufacturing Co., Ltd.
InventorsKenji SAKAGUCHI, Kojiro KOMAGAKI, Masashi HATTORI
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Abstract
A metal magnetic thin film comprising a plurality of columnar structures having an amorphous phase and whose longitudinal directions extend in a film thickness direction. The plurality of columnar structures each include a body portion and a sidewall portion continuous with the body portion. The plurality of columnar structures each contains Fe, Co, Si, and B. Also, in the sidewall portion, the total amount of the Fe and the Co is greater than the total amount of the Si and the B in terms of atomic percent concentration.
Claims14
A metal magnetic thin film, comprising:
- a plurality of columnar structures having an amorphous phase and whose longitudinal directions extend in a film thickness direction,
- the plurality of columnar structures each including a body portion and a sidewall portion continuous with the body portion,
- the plurality of columnar structures each comprising Fe, Co, Si, and B, wherein
- in the sidewall portion, a total amount of the Fe and the Co is greater than a total amount of the Si and the B in terms of atomic percent concentration.
1 more element
Dependencies are inferred from the claim text.