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US 2026/0235407 A1Published application
Carrying apparatus for carrying a mems sensor
AssigneeNorthrop Grumman LITEF GmbH
InventorJohannes PFEIFFER
Life of this patent
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Abstract
A carrying apparatus (100) for carrying a microelectromechanical (MEMS) sensor (200) has a carrier platform (110) which is suitable for carrying the MEMS sensor (200), and a coupling structure (120) which has individual, macroscopic springs (130), connected to the carrier platform (110), and which is suitable for being connected to a housing structure (300), wherein the housing structure (300) is suitable for enclosing the carrying apparatus (100) and the MEMS sensor (200) carried by said carrying apparatus.
Claims10
A sensor apparatus, including
- a microelectromechanical, MEMS, sensor;
- a carrying apparatus, which carries the MEMS sensor;
- and
- a housing structure, which encloses the carrying apparatus and the MEMS sensor carried thereon;
- wherein
- the carrying apparatus includes:
- a carrier platform, which carries the MEMS sensor;
- and
- a coupling structure, which has individual, macroscopic springs connected to the carrier platform and is connected to the housing structure.
6 more elements
(canceled)
Dependencies are inferred from the claim text.