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US 2026/0234808 A1Published application
Rapid Solution Combustion Synthesis of Highly Ordered Porous Metal Oxide Layers
AssigneeThe Board of Trustees of the Leland Stanford Junior University
InventorsThomas Colburn, David W. Collinson, Reinhold H. Dauskardt, Robert D. Miller
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Abstract
Fabrication of highly ordered metal oxide layers is performed by combining deposition of an oxidant-containing precursor, a pore-generating precursor, and a metal-containing precursor, depositing the precursor, and combustion of the precursor to form a metal oxide layer. In one example, high-quality porous aluminum oxide layers with controlled, 7 nm ordered porosity is demonstrated.
Claims15
A method of making a porous metal oxide layer, the method comprising:
- depositing a solution onto a substrate to provide a deposited layer, wherein the solution includes a nonvolatile oxidizing reagent, a porogen, and one or more metal ion complexes of one or more metallic species;
- aging the deposited layer to perform self-assembly in the deposited layer, wherein the structured, self-assembled layer is generated having a structure determined in part by the porogen;
- oxidizing the structured, self-assembled layer to form the porous metal oxide layer via a rapid, local, exothermic oxidation reaction that provides decomposition of the porogen;
- wherein pores of the porous metal oxide layer are formed by decomposition of the porogen in the oxidizing step, wherein the porous metal oxide layer has a pore structure corresponding to the structure of the structured self-assembled layer.
1 more element
Dependencies are inferred from the claim text.