Ultrapure water production apparatus, method of producing ultrapure water, method of managing operation of the ultrapure water production apparatus, and method of measuring colloidal particles

A method of managing operation of an ultrapure water production apparatus comprising a secondary pure water device including:

• a water supply pump, an ion exchanger, and an ultrafiltration membrane device in this order, the secondary pure water device being configured to remove an impurity from primary pure water, the method comprising:
• using at least one of a first combination of an acoustic particle counter and an optical particle counter or a second combination of the acoustic particle counter and a total organic carbon (TOC) meter, the at least one of the first or second combination being disposed at a downstream side of the ultrafiltration membrane device;
• and
• managing operation of the ultrapure water production apparatus, based on measurement values acquired from the at least one of the first or second combination.

A method of measuring colloidal particles in a secondary pure water device including:

• a water supply pump, an ion exchanger, and an ultrafiltration membrane device in this order, the secondary pure water device being configured to remove an impurity from primary pure water, the method comprising:
• using at least one of a first combination of an acoustic particle counter and an optical particle counter or a second combination of the acoustic particle counter and a total organic carbon (TOC) meter, the at least one of the first or second combination being disposed at a downstream side of the ultrafiltration membrane device;
• and
• measuring colloidal particles, based on measurement values acquired from the at least one of the first or second combination.