Chip structure and method of fabricating the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKuo-Chiang Ting, Jian-Wei Hong, Sung-Feng Yeh
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKuo-Chiang Ting, Jian-Wei Hong, Sung-Feng Yeh
Estimating the term…
A chip structure provided herein includes a bridge structure including an interconnect bridge, a dielectric layer laterally surrounding the interconnect bridge and through dielectric vias extending from a top of the dielectric layer to a bottom of the dielectric layer, wherein a thickness of the interconnect bridge is identical to a height of each of the through dielectric vias; semiconductor dies disposed on the bridge structure, wherein each of the semiconductor dies overlaps both the interconnect bridge and the dielectric layer and is electrically connected to the interconnect bridge and at least one of the through dielectric vias; and a die support, the semiconductor dies being disposed between the die support and the bridge structure, wherein a sidewall of the die support is coplanar with a sidewall of the bridge structure.
A chip structure, comprising:
A chip structure, comprising:
A chip structure, comprising:
Dependencies are inferred from the claim text.