Semiconductor material and method for preparing the same
AssigneeNational Tsing Hua University
InventorsChao-Hui YEH, Ying-Hao CHU, Po-Wen CHIU
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AssigneeNational Tsing Hua University
InventorsChao-Hui YEH, Ying-Hao CHU, Po-Wen CHIU
Estimating the term…
A method for preparing a semiconductor material includes the steps as follows. A first chalcogenide material is ablated by a power source at a first frequency to form a plurality of first chalcogenide units. The first chalcogenide units are deposited on a substrate to form a base layer. At least one masking layer is formed on the base layer. A second chalcogenide material is ablated by the power source at a second frequency to form a plurality of second chalcogenide units. The second chalcogenide units are deposited on the portion of the surface of the base layer to form at least one doping area. The at least one masking layer is removed to obtain the semiconductor material.
A method for preparing a semiconductor material, comprising:
Dependencies are inferred from the claim text.