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US 2026/0229465 A1Published application
Apparatus for producing functional film and method for producing functional film
AssigneeKonica Minolta, Inc.
InventorKazunari TADA
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Abstract
Disclosed is an apparatus that produces a functional film having an uneven structure, including a plasma electrode used for etching, wherein an area of the plasma electrode is in a range of 1000 to 100,000 cm2.
Claims12
An apparatus that produces a functional film having an uneven structure, comprising a plasma electrode used for etching, wherein an area of the plasma electrode is in a range of 1000 to 100000 cm2.
Dependencies are inferred from the claim text.