Capacitor

Abstract

The present disclosure relates to a capacitor. A capacitor according to an embodiment of the present disclosure includes a plurality of first cells, wherein each of the plurality of first cells includes, a first trench array including a plurality of first trenches formed in a second direction on a substrate, a second trench array including a plurality of second trenches formed in a first direction on the substrate, a third trench array including a plurality of third trenches formed in the first direction on the substrate, a fourth trench array including a plurality of fourth trenches formed in the second direction on the substrate, and a capacitor layer including at least two electrode layers and at least one dielectric layer, wherein each of the plurality of first trenches and each of the plurality of fourth trenches are arranged in the first direction, each of the plurality of second trenches and each of the plurality of third trenches are arranged in the second direction, each of the plurality of first trenches to the plurality of fourth trenches includes a first empty area configured to separate each of the plurality of first trenches to the plurality of fourth trenches at a first ratio, the first trench array is disposed adjacent to the second trench array in the first direction and disposed adjacent to the third trench array in the second direction, the fourth trench array is disposed adjacent to the third trench array in the first direction and disposed adjacent to the second trench array in the second direction, and the capacitor layer is disposed on the substrate along the plurality of first trenches to the plurality of fourth trenches.

Dependencies are inferred from the claim text.