Substrate processing apparatus, substrate processing method, and recording medium

A substrate processing apparatus, comprising:

• a rotary holder configured to hold and rotate a substrate;
• an arm configured to hold a plurality of nozzles;
• a driver configured to drive the arm so that the plurality of nozzles move between a standby position outside the substrate held by the rotary holder and a processing position above the substrate held by the rotary holder;
• a capturer configured to capture an image of the plurality of nozzles;
• a supplier configured to supply processing liquids to each of the plurality of nozzles;
• and
• a controller,
• wherein the controller is configured to control the supplier and the capturer to perform:
• a first process of causing the capturer to capture images of the plurality of nozzles located at the processing position when the supply of the processing liquids to the plurality of nozzles is stopped;
• a second process of detecting tip end portions of the plurality of nozzles based on the images captured in the first process;
• a third process of detecting whether a droplet is hanging from an injection port of each of the tip end portions detected in the second process based on the images captured in the first process;
• a fourth process of calculating a height of the droplet when the hanging droplet is detected in the third process;
• and
• a fifth process of determining whether an abnormality exists based on the height of the droplet calculated in the fourth process.