Information processing method, computer program, and information processing apparatus

A non-transitory computer-readable medium storing executable instructions, which when executed by processing circuitry, cause the processing circuitry to perform a method, the method comprising:

• acquiring input data to a substrate processing apparatus, intermediate data measured in relation to substrate processing performed by the substrate processing apparatus based on the input data, and processing result data measured in relation to a processing result of the substrate processing;
• generating a processing result prediction model to receive the intermediate data as an input and output a prediction value of the processing result data;
• estimating intermediate data for improving prediction accuracy of the processing result prediction model;
• and
• estimating input data for obtaining the estimated intermediate data.

An information processing apparatus comprising:

• controller circuitry, wherein the controller circuitry is configured to
• acquire input data to a substrate processing apparatus, intermediate data measured in relation to substrate processing performed by the substrate processing apparatus based on the input data, and processing result data measured in relation to a processing result of the substrate processing,
• generate a processing result prediction model configured to receive the intermediate data as an input and output a prediction value of the processing result data,
• estimate intermediate data for improving prediction accuracy of the processing result prediction model, and
• estimate input data for obtaining the estimated intermediate data.